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Abstract

The convergence of Information Technology and Operational Technology has exposed Industrial Control Systems (ICS) to multi-stage cyberattacks that traverse software, network, and physical process layers simultaneously. Although Provenance-based Intrusion Detection Systems (PIDS) are effective in Information Technology (IT) environments, their applicability to Industrial Cyber-Physical Systems (CPS) remains largely unexplored because of the absence of datasets that jointly capture host-level causal behavior, industrial network semantics, and physical process state. To address this gap, we design an open-source, Hardware-in-the-Loop (HIL) CPS testbed that replicates an industrial chemical reactor control architecture across the Purdue model layers. Using this testbed, we propose ProvICS, a multimodal provenance dataset purpose-built for CPS intrusion detection, which synchronously captures four streams: whole-system provenance graphs from the supervisory host and the resource-constrained PLC, decoded Modbus deeppacket inspection records, and physical process telemetry. The collection comprises a 48-hour benign phase and a 22-hour attack phase across four campaigns covering 20 ICS ATT&CK techniques over 32 attack events, ranging from reconnaissance to physical process manipulation. Comparative analysis shows that ProvICS is among the few existing ICS/CPS benchmarks with multi-host kernel-level provenance, real PLC hardware-inthe-loop execution, decoded Modbus traffic, physical processstate measurements, and auxiliary raw PCAP traces in a timesynchronized collection. Baseline detection further confirms that cross-modal fusion can detect all 32 labeled attack events (F1 = 0.913, false-positive rate (FPR) = 1.40%), demonstrating the datasets ability to expose complementary attack signals across modalities and addressing a gap not covered by prior benchmarks.